Leica Microsystems Jena Gmbh

Knut Hiltawski

Andreas Birkner

Frank Bernhardt

Joachim Wienecke

Karsten Urban

Dominik Grau

The invention relates to an arrangement for transporting and inspecting semiconductor substrates (), having at least three workstations (), a changer (), which has at least three arms () which are designed to load the individual workstations () with semiconductor substrates (). A measuring device () is assigned to the second workstation (), determines the deviation of the current position of the semiconductor substrate () and makes it available to the arrangement () for the further inspection of the semiconductor substrate (). In addition, the changer () is not equipped with means for exact positioning of the semiconductor substrates () in the workstations ().

Method and arrangement for transporting and inspecting semiconductor substrates

The invention is based on a substrate conveying module () for conveying substrates into a workstation () for inspection, measurement, or processing of the substrates, in which on because of connecting elements () in at least two side walls () of the substrate conveying module () and/or in at least two side walls () of the workstation (), the substrate conveying module () can, at the installation location of the workstation (), be flexibly connected thereto in different orientations with respect to the workstation () and/or can be coupled at different points to the workstation ().

Substrate conveying module and system made up of substrate conveying module and workstation

An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprising A corresponding identification method is also described.

Arrangement and method for the identification of substrates

The invention relates to an arrangement for transporting and inspecting semiconductor substrates ( ), having at least three workstations ( ), a changer ( ), which has at least three arms ( ) which are designed to load the individual workstations ( ) with semiconductor substrates ( ). A measuring device ( ) is assigned to the second workstation ( ), determines the deviation of the current position of the semiconductor substrate ( ) and makes it available to the arrangement ( ) for the further inspection of the semiconductor substrate ( ). In addition, the changer ( ) is not equipped with means for exact positioning of the semiconductor substrates ( ) in the workstations ( ).

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Saalfeld, Germany

Knut Hiltawski