Leybold Aktiengesellschaft

Toppan Printing Co., Ltd.

Klemens Ruebsam

Thomas Krug

Takashi Miyamoto

Mitsuru Kano

Helmut Grimm

Mamoru Sekiguchi

Noboru Sasaki

Andreas Meier

Jochen Heinz

Gerhard Steiniger

Mika Gamo

Hans Kessler

Hiroyuki Yasujima

Wolfgang Wagner

Georg Harwarth

Bjoern Elvers

Ulrich Reibold

Norbert Ross

Helmut Kubik

Stefan Heimrich

Klaus Eckert

Werner Pflueger

The invention relates to a vacuum coating installation comprising a container (9) in which is disposed the material (10) to be vaporized, for example SiO. The vaporization of the material (10) herein takes place by means of an electron beam gun (11) or by means of a vaporization oven. Opposing the surface of the material to be vaporized (10) is provided a synthetic film (5) to be coated which is transported further by means of a transport arrangement (4, 6, 22 to 27). Into the space between the material (10) to be vaporized and the material (5) to be coated a microwave is irradiated from an horn antenna (13).

Vacuum coating installation

The invention relates to a method for the aftertreatment of an oxide coating, and specifically an SiO.sub.x coating on a synthetic film. In this aftertreatment the oxide coating is exposed to a plasma whose particles effect positive changes of the oxide coating.

Method for treating an oxide coating

An apparatus for the continuous coating of band-type substrates in a vacuum chamber comprises a plurality of evaporation vessels 1, 1', . . . of the same size and configuration. These vessels form a row of evaporation vessels aligned with the direction of movement of the band and are spaced approximately equally apart. All vessels are made of an electrically conductive, ceramic material and can be heated by directly passing a current. Provision is made for a device for the continuous supply of wire to be evaporated to the evaporator vessels. The individual evaporator vessels 1, 1', . . . of the row are offset with respect to one another. Together, they cover a small coating zone B which extends transversely to the direction of movement A of the band.

Apparatus for the continuous coating of band-type substrate

A series evaporator for vacuum vapor-deposition apparatus has several evaporators 5 with individual power control, heated by passing through a current, supported on column-like, electrical supply lines 3, 4 wherein the column-like supply lines 3, 4 are held by an electrically conductive support body 6 extending over the entire length of the series evaporator. The supply lines 3 of the one polarity are connected to the support body 6 in an electrically conductive manner whereas the supply lines 4 of the other polarity are passed through the support body 6 in an insulated manner and connected to conducting wires 7 disposed in an insulated manner. Spring elements 8 apply pressure to the supply lines 4 traversing the support body 6 with play a, b, the action of these spring elements being exerted approximately parallel to the longitudinal extension of the evaporator and pressing the top portions 9 of the supply lines 4 against the front surfaces 10 of the evaporator 5 which they face. The spring elements themselves are held and guided in an insulating manner with respect to the support bodies 6 or are made of an insulating material, and the conducting wires 7 connected to these supply lines 4 are conductors passed through by a coolant or are configured as cooling tubes 11 or cooling pipes running parallel to the conducting wires and discharging into chambers or channels 12 provided in the supply lines 4.

Series evaporator for vacuum vapor-deposition apparatus

In a method and in an apparatus for the production of a corrosion-resistant coating of high reflectivity on the surface of workpieces, especially reflector inserts formed from plastic, in a vacuum chamber with a glow-discharge cathode and an evaporator, there is deposited on a coating consisting of a protective lacquer a second coating of a polymer, preferably of hexadimethylsilane, then a third coating of a metal, preferably aluminum, and lastly a fourth coating of a polymer, preferably of hexadimethylsilane. Both the metal evaporation and the polymerization of the protective coatings on the reflective coating and on the lacquer coating are performed in the same vacuum chamber.

Method for producing a corrosion-resistant coating on the surface of

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Jossgrund, Germany

Klemens Ruebsam