Steag Hamatech Ag

Steag Hamatech Gmbh Machines

Klaus Weber

Ulrich Speer

Ludwig Denzler

Martin Kallis

Jurgen Kallis

Bernd Mahner

An apparatus for fixing and centering substrates that are each provided with an inner hole is provided. The apparatus has a housing having an axis that extends perpendicular to the plane of a substrate placed on the apparatus. A fixation unit is guided in the housing and is introducible into the inner hole of a substrate. The fixation unit includes an outer element that is moveable along the axis of the housing and relative to the housing, and also includes an inner element that is moveable along the axis of the housing and relative to the housing and to the outer element, which, by way of a relative movement of the inner and outer elements, is expandable for engagement with the inner hole of a substrate.

Apparatus for fixing substrates

An apparatus and method are provided for handling substrates that are provided with an inner hole. The apparatus includes an inner gripper in the form of an inner hole gripper, and an outer gripper that is embodied as a vacuum gripper and is provided with a ring in which are disposed a plurality of suction devices. A control unit controls the inner and outer grippers such that they are moved relative to one another, while they grasp one and the same substrate, for deforming or bending the substrate. According to the method, a first substrate is grasped by the inner hole gripper, is brought into contact with an outer gripper, and is grasped by the outer gripper. The inner hole gripper is released and moved through the hole in the first substrate and then grasps a second substrate. After releasing the second substrate, the inner hole gripper again grasps the first substrate and the inner and outer grippers are moved relative to one another to bend the first substrate, whereupon the center portion of the bent first substrate is brought into contact with the second substrate. Thereafter, the remaining portions of the first substrate are brought into contact with the second substrate.

Apparatus and method for handling substrates

A device for conveying substrates through a substrate treatment device has a base transport belt defining a transport plane and two lateral transport belts positioned at a first spacing above the base transport belt. The two lateral transport belts are laterally spaced at a second spacing to one another. Each one of the two lateral transport belts defines a lateral transport plane. Each one of the lateral transport planes is positioned at a slant to the transport plane of the base transport belt. The two lateral transport belts and the base transport belt have cutouts for receiving vertically poisoned substrates. At least one of the first spacing and the second spacing is changeable. Also, the slant angle between at least one of the lateral transport planes to the transport plane of the base transport belt is changeable.

Device for conveying substrates through a substrate processing plant

In a method for coating of disc-shaped data storage media with a coating medium at least one coating nozzle is moved quickly by a first movement into the vicinity of a coating medium application location at the inner area of a storage medium and subsequently the at least one application nozzle is moved slowly by a second movement to the location of application. The coating medium is applied at the location of application and is distributed by a centrifugal force resulting from rotation of the storage medium. The device for coating disc-shaped data storage media with a coating medium has a rotatable support for the storage medium and at least one coating nozzle comprising a drive unit for moving the at least one coating nozzle across the storage medium to a location of application of the coating medium. The drive unit is a hydraulic arrangement with a first hydraulic cylinder for a first, fast movement and a second hydraulic cylinder for a second, slow movement of the at least one coating nozzle.

Process and device for coating disc-shaped data storage media

A device for drying substrate disks by irradiation with ultraviolet light, wherein during the irradiation process a glass plate is resting on the substrate disk, has a lower part on which the substrate disk rests during drying and a liftable and lowerable upper part for lowering a glass plate onto the substrate disk resting on the lower part. The upper part has a glass plate holding device that is lowered below the substrate disk upon lowering of the upper part for placement of the glass plate onto the substrate disk.

Growing community of inventors

Bretten, Germany

Klaus Weber