Heraeus Quarzglas Gmbh & Co Kg

Klaus-Uwe Badeke

Martin Trommer

Walter Lehmann

Michael Hünermann

Hilmar Laudahn

Norbert Otto

Andreas Brueckel

Martin Hengstermann

A method for the production of synthetic quartz glass using a special cleaning device is provided. The method includes (a) evaporating a production material containing a polymerizable polyalkylsiloxane compound while forming a production material vapor, (b) passing the production material vapor resulting from step (a) through a cleaning device to purify the production material vapor, (c) supplying the purified production material vapor resulting from step (b) to a reaction zone in which the purified production material vapor is converted to SiOparticles through oxidation and/or through hydrolysis, (d) depositing the SiOparticles resulting from step (c) on a deposition surface, and optionally drying and vitrifying the deposited SiOparticles resulting from step (d) to form synthetic quartz glass. The cleaning device includes a bulk of porous silica particles which have a BET specific surface area of at least 2 m/g. A device for carrying out the method is also provided.

Process for producing synthetic quartz glass using a cleaning device

A method for manufacturing quartz glass, wherein (a) an appropriate liquid starting material is evaporated by spraying it into a vertically arranged evaporation chamber, (b) the vaporous starting material is oxidized to form SiO, and the SiOis collected. The method is characterized in that the starting material to be evaporated is sprayed in on the bottom of the evaporation chamber and the vaporous starting material is removed at the top end of the evaporation chamber, wherein the evaporation chamber is designed such that components depositing in the chamber accumulate on the bottom of the evaporator and are sprayed once again, as well as an evaporator for applying the method.

Evaporator and method for producing synthetic fused quartz

The invention relates to a method for producing synthetic quartz glass by vaporizing a polyalkylsiloxane as a liquid SiOfeedstock (), converting the vaporized SiOfeedstock () into SiOparticles, separating the SiOparticles, forming a soot body () and vitrifying the soot body (). According to the invention, the vaporizing of the heated SiOfeedstock () comprises an injection phase in an expansion chamber (), in which the SiOfeedstock () is atomized into fine droplets, wherein the droplets have an average diameter of less than 5 pm, and wherein the atomizing of the droplets takes place in a preheated carrier gas stream which has a temperature of more than 180&#xb0; C.

Method for producing synthetic quartz glass

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Petersberg-Sennewitz, Germany

Klaus-Uwe Badeke