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Siemens Aktiengesellschaft

Schott Ag

W.c. Heraeus Gmbh & Co Kg

Klaus Petermann

David Francis Lupton

Jochen Alkemper

Martin Letz

Lutz Parthier

Armin Splett

Gunther Wehrhan

Frank Heine

Regina Martin

Joerg Staeblein

Jorg Schielke

Konrad Knapp

Thomas Schwander

Bernd Schuppert

Joachim Schmidtchen

Manfred Weigelt

Eric Mix

Livio Fornasiero

Fabian Florian Kerbstadt

Robert Lange

Bernd Michael Dicks

The optical elements for ultraviolet radiation, especially for microlithography, are made from cubic granet, cubic spinel, cubic perovskite and/or cubic M(II)- as well as M(IV)-oxides. The optical elements are made from suitable crystals of YAlO, LuAlO, CaAlSiO, KNaAlF, KNaScF, KLiAlFand/or NaAlLiF, (Mg, Zn)AlO, CaAlO, CaBOand/or LiAlO, BaZrOand/or CaCeO. A front lens used in immersion optics for microlithography at wavelengths under 200 nm is an example of a preferred optical element of the present invention.

Method for making optical elements for microlithography, the lens systems obtained by the method and their uses

A planar optical apparatus for setting the chromatic dispersion in an optical system, which apparatus has: a waveguide input structure with a first free-beam region, a first phase grating, connected to the first free-beam region, for spatially separating the spectral components of a signal, a second free-beam region, connected to the first phase grating, an optical element for spatially dependent modification of the phase of the spatially separated spectral components in the second free-beam region, a second phase grating, connected to the second free-beam region, for combining the spectral components, with their phase modified, and a waveguide output structure with a third free-beam region. In this case, the optical element for spatially dependent modification of the phase of the spatially separated spectral components includes a first phase plate that can be displaced in the second free-beam region.

Planar optical apparatus for setting the chromatic dispersion in an optical system

An optical waveguide has a core, wherein the core is doped with laser-active ions, and also additionally doped with Ce.

Optical waveguide

A sintered rhenium crucible, highly suitable for growing single crystals from refractory metal oxides, for example by the Czochralski technique, is formed of fine rhenium powder, by sintering. A compact is formed by cold isostatic pressing and thereafter the compact is sintered at 500-2800.degree. C. to obtain a sintered crucible. Product density is limited to 88-95% of theroretical in order to maximize creep resistance.

Crucible for growing single crystals, process for making the same and

Semiconductor element with a silicon layer

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Wedel, Germany

Klaus Petermann