Other

Carl Zeiss Semiconductor Manufacturing Technologies Ag

Amsl Netherlands B.v.

Klaus Mehlkopp

Albrecht Hof

Erik Roelof Loopstra

Johannes Hubertus Josephina Moors

Antonius Johannes Josephus Van Dijsseldonk

Dominicus Jacobus Petrus Adrianus Franken

Michael Muehlbeyer

Josephus Jacobus Smits

Guenter Maul

Michael M&uuml;hlbeyer

G&uuml;nter Maul

An optical system, in particular an exposure lens for semiconductor lithography, with a plurality of optical elements has at least one load-dissipating structure. The load-dissipating structure diverts the forces originating from the optical elements. The optical system also has a measuring structure constructed independently of the at least one load-dissipating structure.

Optical system with isolated measuring structure

A lithographic projection apparatus according to one embodiment of the invention includes a projection system having a plurality of optical elements or sensors mounted on a frame. The frame includes support portions made of a material (e.g. a glass ceramic) having a coefficient of thermal expansion of less than or approximately equal to 0.1&times;10 K .

Lithographic apparatus and device manufacturing method

The present invention is a process by which optical surfaces of lenses, particularly plastic progressive lenses and molding shells for producing lenses are manufactured directly in a single step according to didicidual data. A blank from which an optical surface or a molding shell is to be manufactured is held at the workpiece carrier of a spindle axis (Z axis) of a shaping machine and is directly turned into its final form by a turning tool which can move relative to the blank (in the X axis), i.e., transversely to the direction of displacement of the tool. During each rotation of the spindle, the turning tool is incrementally adjusted towards or away from the blank depending on the characteristic surface data, which may be predetermined or calculated on-line.

Process for manufacturing optical surfaces and shaping machine for carrying out this process

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Alsdorf, Germany

Klaus Mehlkopp