Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Klaus Heinrich

Martin Richter

Martin Wackerle

Juergen Kruckow

Yuecel Congar

Waltraud Hell

Jürgen Kruckow

The invention relates to a pump having a piezo diaphragm transducer arranged at a pump body of the pump, and to a method for producing a pump, wherein a piezo diaphragm transducer is mounted to a pump body, wherein the method, among other things, has providing a piezoceramic layer. In accordance with the invention, at least one piezo element is diced from the piezoceramic layer so that the at least one piezo element has a regular polygon shape having at least six corners. In addition, the method has forming the piezo diaphragm transducer by mounting the piezo element to a pump diaphragm.

Pump comprising a polygon-shaped piezo diaphragm transducer

A pump has an inlet opening, an outlet opening, a pump diaphragm comprising an opening, provided with a passive check valve, through the pump diaphragm, and an actuator configured to move the pump diaphragm between a first position and a second position. The passive check valve is configured such that a movement from the first position in the direction toward the second position has a closing effect, and that a movement from the second position in the direction toward the first position has an opening effect, so that a pumping cycle wherein the pump diaphragm is moved from the first to the second positions, and back, causes a net flow from the inlet opening to the outlet opening.

Pump, pump arrangement and pump module

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Munich, Germany

Klaus Heinrich