Cardinal Cg Company

Klaus H W Hartig

Kari B Myli

Gary L Pfaff

Keith James Burrows

Greg Vance

Eric H Eby

John R German

Daniel J Plaggemeyer

Christopher L Gruber

The invention provides a sputter deposition assembly that includes a sputtering chamber, a sputtering target, and a magnet assembly. The magnet assembly includes a magnetic backing plate comprising an elongated flexible magnetic control body or a plurality of layered metal sheets.

Flexible adjustable return path magnet assembly and methods

A switchable hydride smart window solid thin film coating having variable opacity and the methods for producing the same is described. The coating includes the following layers deposited on substrate such as glass: a switchable layer, an optional barrier layer, a catalyst layer, an optional barrier layer, a solid electrode, an ion storage layer, an optional insulating layer and a transparent conductor layer. The switchable layer is preferably formed of a magnesium alloy and ore preferable, a ternary alloy of magnesium along with two additional rare earth metals such as yttrium (Y) and Titanium (Ti), i.e., MgYTi.

Switchable hydride smart window and the methods for producing the same

The invention provides a sputter deposition assembly that includes a sputtering chamber, a sputtering target, and a magnet assembly. The magnet assembly includes a two-part magnetic backing plate that includes first and second plate segments, of which at least one is laterally adjustable. Also provided are methods of operating the sputter deposition assembly.

Laterally adjustable return path magnet assembly and methods

The invention provides a sputter deposition assembly that includes a sputtering chamber, a sputtering target, and a magnet assembly. The magnet assembly includes a magnetic backing plate with a blind recess into which a moveable magnetic control body can be adjustably disposed.

Adjustable return path magnet assembly and methods

The invention provides low solar transmittance coatings that have particularly low solar transmittance. The coating includes three infrared-reflection film regions, which may each comprise silver. In some cases, the coating is incorporated into a laminated glass assembly.

Low solar transmittance coatings

A cathode target assembly for use in sputtering target material onto a substrate includes a generally cylindrical target and a magnetic array. The magnetic array is adapted to provide a plasma confinement region adjacent an outer surface of the target. End portions of the magnetic array are adapted to make the shape and strength of the confinement field at the turns of the racetrack closely match the shape and strength of the confinement field along the straight part of the racetrack so as to significantly reduce cross-corner effect.

Apparatus for cylindrical magnetron sputtering

A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.

Plasma emission monitor and process gas delivery system

The invention provides emission control coatings. The coating includes a transparent conductive film over which there is an oxygen barrier film. In some embodiments, the transparent conductive film comprises indium tin oxide and the oxygen barrier film comprises silicon nitride.

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Avoca, WI, United States of America

Klaus H W Hartig