Inficon Gmbh

Klaus Dietrich

Martin Wüest

Dietmar Bertsch

Nico Onda

Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 &#x3bc;m to 30 &#x3bc;m. The ceramic parts are pressed together at increased temperature of 600&#xb0; C. to 680&#xb0; C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450&#xb0; C. to 575&#xb0; C. such that the metallic aluminum is oxidized into aluminum oxide.

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Dornbirn, Austria

Klaus Dietrich