Lambda Physik Ag

Microlas Lasersystem Gmbh

Innovavent Gmbh

Klaus Brunwinkel

Uwe Stamm

Peter Heist

Frank Voss

Berthold Burghardt

Stefan Borneis

Peter Oesterlin

Ulf Krause

Henning Schmidt

Thomas Gabler

Günter Hollemann

Hans-Jürgen Kahlert

A laser system, which is used in material processing to produce a radiation line of small width and uniform high intensity in the longitudinal direction, produces radiation that has different mode numbers Mperpendicular to the propagation direction.

Anamorphotic solid-sate laser

An apparatus and a method for controlling the intensity distribution of a laser beam for processing a substrate provide that the laser radiation passes a homogenizing device, subsequent to which partial beams of the laser beam superimpose one another so that a homogenization of the intensity distribution of the laser beam is achieved. By arrangement of a diaphragm at a position in the radiation path of the laser beam, radiation is cut out off the partial beams superimposing one another in such a way that varied portions of at least some of the partial beams are cut out.

Means and method for controlling the intensity distribution of a laser beam

A technique of stabalizing during operation a gas mixture with a gas composition initially provided within a discharge chamber of an excimer or molecular fluorine gas discharge laser includes monitoring a temporal pulse shape of the laser beam and adjusting and/or determining the status of the gas mixture based on the monitored temporal pulse shape. The monitored temporal pulse shape is preferably compared with a reference temporal pulse shape. The difference or deviation between the monitored temporal pulse shape and a reference temporal pulse shape is calculated. The amount of and intervals between gas replenishment actions are determined based on the calculated deviation. The energy of the beam is also monitored and the driving voltage and gas actions are adjusted to stabilize the energy, energy stability and/or energy dose.

Very stable excimer or molecular fluorine laser

Growing community of inventors

Göttingen, Germany

Klaus Brunwinkel