Carl Zeiss Industrielle Messtechnik Gmbh

Klaus Bendzulla

Ralf Bernhardt

Guenter Grupp

Eugen Aubele

Günter Grupp

Gerd Moser

A coordinate measuring machine including a workpiece support for mounting a workpiece to be measured; a mechanism for moving a sensor in a first coordinate direction and a second coordinate direction perpendicular thereto. The mechanism includes: a first measurement slide guided in the first coordinate direction along two parallel guides arranged on opposite sides of the workpiece support. The first measurement slide spans the support. The first slide is driven via a first drive, which drives the first slide along a first guide of the guides, and is driven via a second drive, which drives the first slide along the second of the guides; a second measurement slide guided movably in the second coordinate direction along the first measurement slide. The second slide is assigned a position measuring system, via which the position of the second measurement slide relative to the first measurement slide can be determined; a controller, which actuates the first and second drive. The controller includes a force feedforward control, which, depending on the detected position (x) of the second measurement slide and depending on a setpoint acceleration (a) to be set of the first measurement slide, brings about an actuation of the first drive and/or of the second drive in such a way that the torques which as a result of the acceleration of the first measurement slide by the first drive and by the second drive relative to a rotation axis (R) which is perpendicular to the first and second coordinate directions at least partly or completely compensate for one another.

Coordinate measuring machine and method for operating a coordinate measuring machine

A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.

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Morsbach, Germany

Klaus Bendzulla