Hamamatsu-Photonics K.k.

Kiyotada Hosokawa

Shigeru Eura

An orientation characteristic measurement system () includes an irradiation optical system (), a detection optical system (), a light detector (), a rotation mechanism () changing an angle (ϕ) between a surface of the sample and an optical axis (L) of the detection optical system (), and a computer (), and the computer () includes a rotation mechanism control unit () controlling the rotation mechanism (), a distribution acquisition unit () normalizing an angle-dependent distribution of light intensity to acquire an angle-dependent distribution of light intensity, an area specifying unit () specifying light intensity in a maximum area on the basis of the angle-dependent distribution of the light intensity, and a parameter calculation unit () calculating the orientation parameter (S) on the basis of a linear relationship determined using the film thickness and refractive index of the sample and the light intensity in the maximum area.

Orientation characteristic measurement method, orientation characteristic measurement program, and orientation characteristic measurement device

An orientation characteristic measurement system includes an irradiation optical system, a detection optical system, a light detector, a rotation mechanism changing an angle (&#x3d5;) between a surface of the sample and an optical axis (L) of the detection optical system, and a computer, and the computer includes a rotation mechanism control unit controlling the rotation mechanism, a distribution acquisition unit normalizing an angle-dependent distribution of light intensity to acquire an angle-dependent distribution of light intensity, an area specifying unit specifying light intensity in a maximum area on the basis of the angle-dependent distribution of the light intensity, and a parameter calculation unit calculating the orientation parameter (S) on the basis of a linear relationship determined using the film thickness and refractive index of the sample and the light intensity in the maximum area.

Growing community of inventors

Hamamatsu, Japan

Kiyotada Hosokawa