Matsushita Electric Industrial Co., Ltd.

Kiyoshi Uchiyama

Akira Takamori

Masato Nakajima

Tomoko Suzuki

Ken Idota

Tatsuo Yokotsuka

A thermal decomposition cell for producing a molecular beam from a material gas, includes: a crucible maintained at a given temperature necessary for thermal decomposition of the material gas which is effused in the crucible in a given direction; and a thermal decomposition baffle provided in the crucible and heated to a given temperature necessary for thermal decomposition of the material gas for producing the molecular beam by thermal-decomposing of the material gas such that the material gas is baffled in substantially all directions, the thermal decomposition baffle being made of a given metal to cause the thermal decomposition of the material gas. The thermal decomposition baffle may comprise a fiber or a cloth made of the metal loaded in the crucible. The thermal decomposition baffle may comprise a plurality of different sized rooms made of the given metal, each of said rooms having fine holes to allow the material gas to pass therethrough, and successively arranged in such a manner that said material gas moves from one room toward the other adjacent thereto.

Thermal decomposition cell

A method for fabricating an AlGaInP-based visible light laser device by molecular beam epitaxy is described. In this method, a upper clad layer of (Al.sub.x Ga.sub.1-x).sub.y In.sub.1-y P wherein x and y are, respectively, in the ranges of from 0.5 to 1 and from 0.47 to 0.53 is covered with a protective layer serving also as an etching prevenive layer so that a grooved-type structure using the (Al.sub.x Ga.sub.1-x).sub.y In.sub.1-y P clad layer can be fabricated without involving degradation of the clad layer by contamination with oxygen, nitrogen and the like.

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Kawasaki, Japan

Kiyoshi Uchiyama