Canon Kabushiki Kaisha

Kiyoshi Takimoto

Haruki Kawada

Hisaaki Kawade

Ken Eguchi

Hiroshi Matsuda

Kunihiro Sakai

Hideyuki Kawagishi

Yuko Morikawa

Toshihiko Miyazaki

Yoshihiro Yanagisawa

Etsuro Kishi

Toshihiko Takeda

Yoshinori Tomida

Ryo Kuroda

Koji Yano

Yuji Kasanuki

Toshiaki Kimura

Kenji Saito

Katsunori Hatanaka

Hiroyasu Nose

Kenji Saitoh

Yukuo Nishimura

Toshimitsu Kawase

Tsutomu Ikeda

Osamu Takamatsu

Masahiko Miyamoto

Suomi Kurihara

Yasuhiro Shimada

Takahiro Oguchi

Hideo Kato

Akihiko Yamano

Takashi Nakagiri

Takehiko Kawasaki

Shunichi Shido

Katsuhiko Shinjo

Masafumi Kyogaku

Takeo Yamazaki

Junji Ohyama

Hiroo Azuma

Yasufumi Sato

Taichi Sugimoto

Horoshi Matsuda

The method of forming a micro-pattern comprising forming an organic thin film by building up monomolecular films on an insulating substrate; heating and baking the organic thin film to turn the organic thin film into an amorphous carbon or graphite film, thereby providing an electroconductive thin film; and processing the organic thin film by conducting a microcutting work on it while holding a probe in contact with the organic thin film by means of atomic force to produce the micro-pattern.

Method for forming a micro-pattern

Probe including a cantilever having a movable end and formed from an elastic body, an electroconductive sensing needle arranged at the movable end of the cantilever, and a field effect transistor arranged at the movable end of the cantilever and having a gate electrode electronically connected to the electroconductive sensing needle. The probe may further comprise another field effect transistor formed on the cantilever and having its drain electrically connected to the sensing needle. The probe may be used in an information recording/reproduction apparatus.

Probe and information recording/reproduction apparatus using the same

An electrode substrate and a recording medium having a smooth surface with surface unevenness of 1 nm or less and a size of 1 &mgr;m&square; or more are disclosed. An electrode substrate and a recording medium having a concave-shaped groove for tracking on the surface, which groove has a depth which can detect of the tunnel current from the bottom thereof by a probe electrode for scanning the surface are also disclosed. Information processing devices equipped with the smooth recording medium, an electroconductive probe arranged approximate to the recording medium and a pulse voltage application circuit for recording are also disclosed.

Process for preparing an electrode substrate

A physical action such as voltage or the like is locally applied to a recording medium in accordance with information to be recorded and a physical quantity such as a current, a voltage, and the like of a portion of the recording medium to which the physical action is applied, is measured. Recording of information is confirmed on the basis of the measured physical quantity.

Information recording method information recording apparatus

An information recording and/or reproducing apparatus for recording and/or reproducing information to/from a recording medium in a scanning probe microscope comprises a circuit to reproduce recording bits formed on the recording medium on the basis of a physical amount such as tunnel current, interatomic force, electrostatic force, or magnetic force which occurs between the probe and the recording medium, a sensor to detect a state such as film thickness or film quality of the recording medium on the basis of the physical amount before the recording bits are reproduced, and a correcting circuit to correct reproducing conditions such as a magnitude of a voltage which is applied between the probe and the medium on the basis of the detected state of the medium.

Information recording reproducing apparatus using probe

An information recording/reproducing method and apparatus is for carrying out at least one of recording and reproducing information through a probe electrode or through a plurality of probe electrodes on an information recording medium. A probe electrode is disposed on an elastic member. A relative position is so adjusted between the recording medium and the probe electrode that a repulsive force between them is comparative to an elastic force of the elastic member. In case of plural probe electrodes, they are displaced to keep an equal spacing between the recording medium and the respective probe electrodes so that they may have either a zero average or a minimized square sum of displacement. A spacer layer will do for setting a spacing between a probe electrode and the recording medium.

Information recording/reproducing method for recording and/or

An electron-emitting device comprises a substrate, an electrode provided on said substrate, an insulating layer laminated on the electrode, and a second electrode having an opening and laminated on the insulating layer in such a manner that the insulating layer is uncovered at the opening and electrons are emitted from the opening of the second electrode as a result of application of an voltage between the electrodes. An image display apparatus comprises the electron-emitting device, a modulating electrode capable of modulating an electron beam emitted from the electron-emitting device, in accordance with an information signal, and an image forming member capable of forming an image as a result of irradiation with the electron beam, these of which are successively disposed. An image forming apparatus comprises the electron-emitting device, and a means for modulating an electron beam emitted from said electron-emitting device, in accordance with an information signal.

Electron-emitting device and electron beam lithograph machine and image

A scanning atomic force microscope includes a probe arranged near a sample surface to oppose the sample surface, a support device for supporting the prove, a moving mechanism for moving the probe relative to the sample, and a signal detector for detecting a signal corresponding to a structure of the sample surface obtained by the probe. The signal detector includes a laser beam oscillator for oscillating a laser beam, and a laser beam receiving device for receiving the laser beam which is emitted from the laser beam oscillator and is reflected by the support device. The scanning atomic force microscope is further provided with a laser beam output device which has a function of controlling the laser beam oscillator to discontinuously emit the laser beam.

Scanning atomic force microscope

An information recording/reproduction is performed as follows on a recording medium using a probe. A distance between the probe and a recording layer of the recording medium is controlled, and relative movement of the probe and the medium is effected so that the probe scans a surface of the recording layer. Recording bits corresponding to information is recorded or erased on the recording layer under a predetermined recording/erasing condition. The information is reproduced from the recording bits produced on the recording layer upon detection of a physical quantity such as a tunneling current, an electric field radiation current and the like generated between the probe and the recording layer. A characteristic/state such as an electrical characteristic, a surface state and the like of the recording layer is detected. The recording/erasing condition is corrected on the basis of the detected characteristic/state of the recording layer.

Information recording/reproduction apparatus using probe

A method and apparatus for detecting the relative positional displacement between a mask and a wafer. The mask is provided with a cantilever. The position mark is provided on the wafer so as to face the cantilever. A relative positional displacement between the mask and the wafer is detected from a deformation amount of the cantilever based on a force acting between the position mark and the cantilever upon relative movement of the position mark and the cantilever.

Method of detecting positional displacement between mask and wafer, and

The present invention relates to a scanning probe microscope for observing the surface of a sample therethrough by the use of a probe including a probe, means for causing the sample and the probe to scan relative to each other, means for applying an AC voltage between the sample and the probe, and means for detecting an electric current flowing between the sample and the probe at a predetermined phase point of the AC voltage, the surface of the sample being observed on the basis of the detected electric current. The specification also discloses an information recording-reproducing apparatus using such probe microscope.

Scanning probe microscope for observing a sample surface while applying

Information recording/reproducing method, recording carrier and

A method for positioning an information processing head at a predetermined position on a recording medium includes detecting a predetermined magnetization pattern on a magnetic material having a predetermined positional relation to a recording region of the recording medium by a magnetization detector having a predetermined positional relation to the information processing head, generating a signal indicative of a relative position of the information processing head with respect to the recording medium based on a result of the detecting step and moving the information processing head and the recording medium relatively to position the information processing head at the predetermined position with respect to the recording medium based on the generated signal, and a process for forming a cantilever-type probe capable of indicating a magnitude of a magnetic force between the probe and a recording medium and capable of performing at least one of a recording operation and a reproducing operation on the recording medium.

Method for positioning an information processing head by detecting a

A recording-reproducing apparatus includes an electrode, a material that changes its intramolecular electron distribution upon the application of electromagnetic wave irradiation and an electric field provided on the electrode, and an electrically conductive probe having a pointed tip. The apparatus projects an electromagnetic wave onto the material, and applies a pulse voltage between the electrode and the conductive probe.

Recording and reproducing apparatus and method for applying a pulse

An MIM type electric element has an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor. The lower electrode contains a noble metal crystal having a facet of a plate-shaped crystal formed on a substrate. The facet has a plane given by the crystal face (111) and contains a region having a plane orientation variance angle of not more than 1.degree. by X-ray diffraction.

MIM-type electric device production thereof, and electronic apparatus

Growing community of inventors

Isehara, Japan

Kiyoshi Takimoto