Mitsubishi Denki Kabushiki Kaisha

Kiyoshi Taketoh

Masayuki Miyazaki

Shin Sekiya

Toshihide Koda

Yoshihisa Kitora

Tetsuya Honda

Tadahiro Yoshida

Yoshiyuki Itaya

A turbomolecular pump is disclosed which has reduced axial length so as to provide a small-sized pump, and which also has improved stability during high-speed operation, is simple in construction, and is able to operate at much higher speeds than prior art devices. The turbomolecular pump comprises: a cylindrical housing having a plurality of stator vanes provided on the inner peripheral surface thereof, the cylindrical housing having inlet ports and an outlet port; a rotary shaft rotatably supported on the cylindrical casing through bearings; a rotary member fixedly mounted on the rotary shaft and having a plurality of rotor vanes provided on the radially outer peripheral surface thereof, the rotor vanes being interlaced with the stator vanes in a face-to-face relation with each other so that during rotation of the rotor, the rotor and stator vanes cooperate with each other to produce a undirectional flow of a fluid from the inlet ports toward the outlet port; and an electric motor disposed in the cylindrical housing for electromagnetically driving the rotary member to rotate relative to the housing, the motor including a rotor mounted on the rotary member and a stator mounted on the housing in an axially spaced face-to-face relation with the rotor.

Turbomolecular pump

An improved Stirling engine has a piston and a crosshead slidably disposed inside a cylinder and secured to one another by a piston rod so as to reciprocate as a single body with a space formed between the crosshead and the piston. An oil-deflecting guard for deflecting oil which is scattered by the movement of the crosshead is disposed between the crosshead and the piston and is supported so as to move with the crosshead. A first oil-absorbing member for absorbing oil which enters the space above the oil-deflecting guard is disposed on the oil-deflecting guard on the piston side thereof. A second oil-absorbing member is disposed between the first oil-absorbing member and the piston with a space therebetween. The space between the crosshead and the piston can be connected with the inside of a crankcase by oil drainage holes.

Stirling engine

Growing community of inventors

Amagasaki, Japan

Kiyoshi Taketoh