S-tec Corporation

Kiyoshi Satoh

Tadahiro Ohmi

Kiyoharu Tujimura

Noriyuki Kimura

Hiroshi Mihara

Osamu Akebe

The portions on the sides far to each other of two sensor coils wound around the outer circumferential portion of the conduit, through which the fluid passes, at the suitable interval are thermally joined through a thermal conductor and the thermal conductor is heated by means of a heater, whereby the flow rate of fluid can be accurately measured without being influenced by the posture error resulting from the convection.

Thermal mass flow meter

A mass flow meter includes a housing body having a fluid passageway extending therethrough with a capillary tube communicating with the fluid passageway. The capillary tube is connected through a pair of metallic sleeves mounted on a base member which in turn is fastened to the housing body. A pair of sensor coils is connected to the capillary tube to measure any fluid flow. A metal sensor case is welded airtight to the base member to encapsulate the capillary tube.

Mass flowmeter with hermetically sealed housing

A mass flow controller including a valve assembly wherein a flow rate-controlling portion of the valve assembly is mirror finished and wherein the maximum flow rate through the flow rate-controlling portion during the time that the flow rate is not being controlled is set so as to be sufficiently large in comparison with the flow rate during control whereby a moisture purging function may be performed without external fluid bypass circuits.

Mass flow controller

A sensor case housing a pair of sensor coils wound around a peripheral surface of a conduit, through which a fluid flows, therein is formed of two block members made of materials superior in heat conductivity, at least one of said block members being provided with a pair of support projections formed integrally with said block member adjacent to both ends of said sensor coils on an inner surface thereof, and said conduit being held by means of said support projections.

Growing community of inventors

Mukoh, Japan

Kiyoshi Satoh