Hitachi, Ltd.

Rigaku Corporation

Renesas Technology Corp.

Hitachi Displays, Ltd.

Sony Corporation

Renesas Electronics Corporation

Xwinsys Technology Development Ltd.

Kiyoshi Ogata

Jun Tanaka

Kazuhiko Horikoshi

Kazuhiko Omote

Kazufumi Suenaga

Miharu Otani

Takuo Tamura

Keiko Isoda

Yoshiyasu Ito

Hiroshi Motono

Keiichi Yoshizumi

Hisayuki Kato

Sei Yoshihara

Toshihiko Itoga

Hironaru Yamaguchi

Shigematsu Asano

Katsutaka Horada

Yoshinobu Kimura

Yasumichi Suzuki

Katsuhiko Hotta

Makoto Ohkura

Naoki Matsushima

Hironobu Abe

Yoichi Takahara

Masakazu Saitou

Hideaki Takahashi

Miwako Nakahara

Hisahiko Abe

Asao Nakano

Shiro Umegaki

Masahito Yamazaki

Sensui Yasuda

Akifusa Higuchi

Tetsuo Kani

Masaya Adachi

Ryoji Oritsuki

Takahiro Kamo

Eisuke Nishitani

Yasushi Nakano

Takahisa Sato

Tadanori Yoshida

Yoshihiro Takeda

Takao Kinefuchi

Ryotaro Yamaguchi

Naoki Kanda

Makoto Kanbe

Muneo Yoshida

Arito Ogawa

Noriyuki Kumasaka

Kazuo Takeda

Licai Jiang

Shuichi Kato

Yasunori Narizuka

Boris Verman

Jun Gotoh

Masakazu Saito

Naoki Kawahara

Naohisa Osaka

Makiko Kohno

Shigeo Shimomura

Michiko Takahashi

Makoto Kambe

Avishai Shklar

Kenji Wakasaya

Ofek Oiknine

Tomoyasu Ueda

Souzou Sasajima

Doron Reinis

A transmission type small-angle scattering device of the present invention includes a goniometerincluding a rotation arm. The rotation armis freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation armbeing defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unitis installed on a lower-side end portion of the rotation arm, and a two-dimensional X-ray detectoris installed on an upper-side end portion of the rotation armto form a vertical arrangement structure.

Transmissive small-angle scattering device

A sample inspection system is described. The system comprises at least first and second inspection units positioned above a sample region. Each of said at least first and second inspection unit comprises at least one X-ray radiation source and respective detector arrangement and configured for X-ray fluorescent inspection of a sample. Wherein the first and second x-ray inspection units provide first and second inspection properties different in at least one of: bandwidth of emitted X-ray energies, energy of emitted X-rays, spot size of X-ray beam generated on a sample.

Dual head X-ray inspection system

A transmission type small-angle scattering device of the present invention includes a goniometerincluding a rotation arm. The rotation armis freely turnable around a &#x3b8;-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unitis installed on a lower-side end portion of the rotation arm, and a two-dimensional X-ray detectoris installed on an upper-side end portion of the rotation armto form a vertical arrangement structure.

This fluorescent X-ray analysis apparatus is provided with an X-ray irradiation unitfor irradiating a sample S with: X-rays, having an energy that exceeds the energy absorption edge value of Ag which is selected as a measurement target element, and that is no greater than the energy absorption edge value of Sn which is an adjacent element having a higher energy absorption edge value than Ag; and X-rays having an energy exceeding the energy absorption edge value of Sn which is selected as a measurement target element.

Fluorescent X-ray analysis apparatus comprising a plurality of X-ray detectors and an X-ray irradiation unit including a multi-wavelength mirror

An X-ray inspection device of the present invention includes a sample placement unitfor placing a sample as an inspection target therein, a sample placement unit positioning mechanismfor moving the sample placement unit, a goniometerincluding first and second rotation membersthat rotate independently of each other, an X-ray irradiation unitinstalled on the first rotation member, and a two-dimensional X-ray detectorinstalled on the second rotation member. The sample placement unit positioning mechanismincludes a &#x3c7; rotation mechanismfor rotating the sample placement unitand a &#x3d5;-axis about a &#x3c7;-axis that is orthogonal to a &#x3b8;s-axis and a &#x3b8;d-axis at a measurement point P and extends horizontally.

X-ray inspection device

A hybrid inspection system of the present invention is an inspection system including a first inspection device () for inspecting a sample () based on X-ray measurement data obtained by irradiating the sample () with X-rays, and a second inspection device () for inspecting the sample () by a measuring method using no X-rays. The X-ray measurement data obtained by the first inspection device or an analysis result of the X-ray measurement data is output to the second inspection device (). In the second inspection device (), the structure of the sample () is analyzed by using the X-ray measurement data input from the first inspection device () or the analysis result of the X-ray measurement data.

Hybrid inspection system

In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

An X-ray thin film inspection device according to the present invention has an X-ray irradiation unitmounted in a first rotation arm, an X-ray detectormounted in a second rotation arm, a fluorescence X-ray detectorfor detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unitfor measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit

X-ray thin film inspection device

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unitinstalled on a first rotation arm, an X-ray detectorinstalled on a second rotation arm, and a fluorescence X-ray detectorfor detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unitincludes an X-ray optical elementcomprising a confocal mirror for receiving X-rays radiated from an X-ray tube, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanismfor passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element

An industrial X-ray tube formed by accommodating a cathode and anode in a container having an evacuated interior, in which electrons emitted from the cathode are caused to strike the anode and X-rays are emitted from the anode. The cathode is formed from graphite. The graphite is a layered crystal obtained by layering a plurality of carbon hexagonal planes. The graphite is cut based on crystal axes of the carbon hexagonal planes. The resulting cut surface is caused to function as an electron-emitting surface. For example, directions of an a- and b-crystal axis may be set so as to be arbitrary between each of the layers of the carbon hexagonal planes, the graphite may be cut along a surface parallel to the c-axis, and the resulting cut surface may be caused to function as an electron-emitting surface. The graphite may also be cut along a surface orthogonal to the c-axis.

Industrial X-ray tube

A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.

Motion control system and X-ray measurement apparatus

An X-ray generator includes a booster circuit formed by sequentially connecting a plurality of boosting steps extending from a low-voltage terminal to a high-voltage terminal of its own. The booster circuit is arranged in a lateral region of the X-ray tube so as to make the low-voltage terminal of its own correspond to the anode of the X-ray tube and the high-voltage terminal of its own correspond to the cathode of the X-ray tube. A lead wire extending from the cathode to the outside of the X-ray tube is connected to the high-voltage terminal of the booster circuit. A molded member containing insulating resin is formed to shield at least a cathode side end part of the X-ray tube, the lead wire outwardly extending from the cathode side end part and a high-voltage terminal side end part of the booster circuit.

Industrial X-ray generator

As etch-stop films or Cu-diffusion barrier films used in insulation films constituting conductor layers of a stacked structure, films having smaller dielectric constant than silicon nitride films are used, and an insulation film at a lower-layer part of the stacked structure is made to have smaller dielectric constant than that at an upper-layer part thereof, and further this insulation film is a silicon oxide (SiO) film and has, in the interior thereof, nano-pores of from 0.05 nm or more to 4 nm or less in diameter as chief construction. This makes it possible to dramatically reduce effective dielectric constant while keeping the mechanical strength of the conductor layers themselves, and can materialize a highly reliable and high-performance semiconductor device having mitigated the wiring delay of signals which pass through wirings.

Semiconductor device

An active matrix type organic light emitting diode display serving as a bottom emission type device coupling out emission of an organic electroluminescence layer from a substrate where thin film transistors are formed or as a top emission type device coupling out the emission on the opposite side to the substrate. In a suitable layer () in each device, an insulating film containing SiO is formed. The insulating film is porous with nano pores in the film. The porous insulating film is controlled as to film density, film refractive index, nano pore diameter in film, average nano pore diameter in film and maximum nano pore diameter in film so that the refractive index is lower than that of a transparent electrode or a transparent substrate of the display holding the organic electroluminescence layer therebetween, and nano pores are present in the film. Light scattering effect can be obtained so that emission from the organic electroluminescence layer () can be coupled out to the outside efficiently.

Organic light emitting diode display with porous insulation film containing SiO

Growing community of inventors

Tokyo, Japan

Kiyoshi Ogata