Hitachi Construction Machinery Co., Ltd.

Kiyoshi Nagasawa

Kozo Ono

Ken Murayama

Kojiro Ogata

Yoshihiro Hoshino

Kichio Nakajima

Kazuo Honma

Hiroaki Tokairin

Takeshi Aritake

A controller for a fine positioning device constructed of planar structural units connected symmetrically and equipped individually with planar flexible beams arranged in an opposing relation between two rigid members and actuators for applying forces between the two rigid members includes displacement detection devices, displacement setting devices, sensor devices for determining the degree of each translational displacement and the degree of each angular displacement, and control devices for controlling the voltages to be applied to the respective actuators.

Displacement controller for fine positioning device

A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.

Fine positioning device and displacement controller therefor

A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. A displacement controller for the fine positioning device is also disclosed.

A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. Three set of radial flexible-beam displacement mechanisms are provided to produce angular displacements about three axes.

Fine positioning device

A working structure having a support and an arm assembly pivotally connected to the support. The arm assembly includes at least two arm members pivotally connected to each other and each pivotally moved by a respective actuator. The second arm member has an external load applied to its front end or working point. The apparatus includes angle sensors for sensing pivoting angles of the respective arm members, load sensors for sensing the external load, target position indication device for indicating the coordinate target position of the working point, and a control unit including a deflection calculation section responsive to signals produced by the angle sensor means and load sensor means for calculating a deflection of the arm assembly at the working point, pivoting angle calculation section responsive to signals produced by the target position indication device for calculating provisional pivoting angles for the arm members corresponding to the target position when the arm assembly is assumed to produce no deflection, and correcting angle calculation section responsive to signals produced by the deflection calculation section and pivoting angle calculation sections for calculating, as correcting angles, the pivoting angles for the respective arm members corresponding to the deflection in the position of the provisional pivoting angles such that the first and second actuators are actuated based on the signals from the pivoting angle calculation and correcting angle calculation sections to pivotally move the first and second arm members to correct any error caused by the deflection of the arm assembly.

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Ibaragi, Japan

Kiyoshi Nagasawa