Nikon Corporation

Kiyoshi Kadomatsu

Yutaka Hamamura

Yasutoshi Takada

Noboru Amemiya

Yoshiro Tani

An optical element that includes a substrate having two surfaces, each of the surfaces having a micro-relief structure that includes numerous fine protrusions, and a film that includes one or more layers including a metal layer and that is formed on one of the micro-relief structures.

Light absorbing optical element having micro-relief structure

An optical element manufacturing method includes: disposing a light-shielding layer () that includes at least an Si layer as an uppermost layer, on a substrate () used as a base member, forming an optical aperture () at the light-shielding layer () and forming a fine recession/projection structure (MR) at a surface of the uppermost layer through dry etching.

Growing community of inventors

Odawara, Japan

Kiyoshi Kadomatsu