Teijin Seiki Co., Ltd.

Kiyoshi Ando

Hiroyuki Takenaka

Masanori Hirai

Tsuyoshi Nachi

Hidekazu Yokoi

An evacuating apparatus having a high energy efficiency when the suction side pressure has reached the ultimate pressure or become a certain degree of vacuum, by decreasing the motive power owing to differential pressure. The evacuating apparatus ( ) having a roughing vacuum pump (B) and a booster pump (A), each of which is constituted by a screw vacuum pump, wherein the design pumping speed of the roughing vacuum pump (B) is sufficiently smaller than the design pumping speed of the booster pump (A), but adequate to be operable as the roughing vacuum pump, and the number of turns of screw for the booster pump (A) is less than the number of turns of screw for the roughing vacuum pump (B).

Evacuating apparatus

A linear motion apparatus is comprised of: a toothed rail (40); a linearly driving mechanism section (50) having a plurality of swinging plates (53), crankshafts (54, 55), and a casing (51); and guiding means for guiding the casing (51) relatively movably with respect to the toothed rail (40). The casing (51) includes: a pair of side portions (61, 62) which are guided by the guiding means on both sides, in a tooth width direction, of the rail (40); a pair of end plate portions (63, 64) which are located on opposite sides, as viewed in a longitudinal direction of the rail (40), of the swinging plates (53) and connect opposite end portions of the pair of side plate portions (61, 62); and a coupling member (521) which is located between the plurality of crankshafts (54, 55) as viewed in the longitudinal direction of the rail and couple intermediate portions of the pair of side plate portions (61, 62). The coupling member (521) is preferably passed through the swinging plates (53). The linear motion apparatus is compact and low-cost, and capable of maintaining a stable state of meshing between swinging plates and a toothed rail even if a compact casing is adopted.

Linear motion apparatus

A rotary motion to longitudinal motion converting mechanism comprising a passive rack with a plurality of teeth, a plurality of active racks respectively having a plurality of teeth having the same pitch as that of the teeth of the passive rack and meshing with the passive rack, and a plurailty of rotatable crankshafts respectively having eccentric circular portions different in phase from one another and respectively having the active racks supported on the eccentric circular portions in such a manner that the passive rack is moved in its longitudinal direction through the active racks by rotary motions of the plurality of rotatable crankshafts.

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Ogaki, Japan

Kiyoshi Ando