Nippon Light Metal Company, Ltd.

Kiyokazu Koga

Kazuo Kohmura

Yosuke Ono

Daiki Taneichi

Yoshihiro Taguchi

Shingo Koizumi

Takayuki Yamaguchi

Akira Iizuka

Yasuyuki Sato

Toshiaki Hirota

Masato Yatsukura

Provided is a support frame for pellicles which includes an aluminum alloy-made frame body with a pellicle film bonded to a front surface of the frame body, and with a glass substrate bonded to a back surface of the frame body. A front-side recessed groove extending in a circumferential direction of the frame body is formed on the front surface of the frame body, and a front-side suction hole extending from an outer peripheral surface of the frame body to an inner surface of the front-side recessed groove is formed on the frame body.

Support frame for pellicles

Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the same. The pellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a MgSi crystallized product, an AlCuMg crystallized product, an Al&#x2014;Fe-based crystallized product (AlFe or AlCuFe), and an AlCuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 &#x3bc;m or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.

Pellicle frame and process for manufacturing same

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Shizuoka, Japan

Kiyokazu Koga