Hitachi, Ltd.

Other

Kiyoji Ikeda

Tohru Nakamura

Katsuyoshi Washio

Takahiro Onai

Takeo Shiba

Tokuo Kure

Yoichi Tamaki

Masatada Horiuchi

Tetsuya Hayashida

Akihisa Uchida

Kazuo Nakazato

Mitsuo Nanba

Katsumi Ogiue

Noriyuki Homma

Hiromichi Enami

Satoru Isomura

Kazuhiko Sagara

Shinji Nakajima

Toru Koizumi

Toru Nakamura

Kaoru Ohgaya

Kunihiko Watanabe

Nakazato Kazuo

A vertical bipolar transistor arrangement in which the distance between the emitter and the isolation region is kept within a range determined by the sum of emitter depth and base width (i.e., the thickness of the base in the depth direction). This keeps the carriers given by the emitter from getting trapped inside, thereby preventing the cut-off frequency from dropping.

Semiconductor bipolar transistor with concentric regions

Semiconductor device with optimal distance between emitter and trench

A multilayer semiconductor integrated circuit having a plurality of wiring layers in which at least the lines of a lower layer are extended on wiring channel regions arranged in a grid. Dummy pedestals are formed of the same conductive layer as that forming the lines of the lower layer and are arranged in the intersecting areas of the wiring channel regions where none of the lines of the lower layer is placed. A method of manufacturing such a semiconductor integrated circuit comprises steps of preparing dummy pedestal layout data for arranging the dummy pedestals in all the intersecting areas of the wiring channel regions and line layout data for forming the lines of the lower layer on predetermined wiring channels among all the wiring channel regions, and combining the dummy pedestal layout data and the line layout data by logical sum (OR).

Semiconductor integrated circuit with dummy pedestals

A semiconductor device is disclosed, which includes bipolar transistor each having an emitter, base and collector formed inside each protruding portion of a semiconductor substrate, and trenches for device isolation. The bipolar transistor and the trench are spaced apart from each other by a predetermined spacing. According to this arrangement, the width of a base contact becomes uniform and any change of transistor characteristics can be prevented effectively.

Semiconductor device

A semiconductor device wherein a layer doped with impurities is provided between a buried layer and an epitaxial layer, said layer doped with impurities having a conductivity of the type opposite to that of said buried layer and said epitaxial layer, a reversely biasing voltage is applied across the buried layer and the layer doped with impurities, and side surfaces of the epitaxial layer are surrounded by an insulator. This helps effectively prevent the element formed in the epitaxial layer from being affected by .alpha.-particles and greatly improve reliability of the semiconductor device.

A 'planar' type plasma-etching apparatus wherein one electrode is a metallic mesh electrode, while the other electrode is a metallic plate electrode, and wherein a work piece is placed outside the mesh electrode. This apparatus has the advantage that a work piece having a large area can be etched uniformly over its whole surface.

Plasma-etching apparatus

Growing community of inventors

Hachioji, Japan

Kiyoji Ikeda