Average Co-Inventor Count = 9.00
ph-index = 4
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (4 from 993 patents)
4 patents:
1. 10043655 - Plasma activated conformal dielectric film deposition
2. 9570274 - Plasma activated conformal dielectric film deposition
3. 8999859 - Plasma activated conformal dielectric film deposition
4. 8637411 - Plasma activated conformal dielectric film deposition