Invensense, Inc.

Agilent Technologies, Inc.

Kelsey-hayes Company

Ge Novasensor, Inc.

Other

Palo Alto Research Center Inc.

General Electric Corporation Gmbh

Leidos, Inc.

Kirt Williams

Matthew Julian Thompson

Richard J Barron

Nadim I Maluf

Edward Nelson Fuller

Houri Johari-Galle

Leonardo Baldasarre

Sarah Nitzan

Bert P Van Drieenhuizen

Joseph Seeger

Dirk De Bruyker

Jongwoo Shin

Scott J Limb

Harry A Hunnicutt

E Nelson Fuller

Farid Matta

Cerina Zhang

Bert P Van Drie&euml;nhuizen

Bert P Van Drieënhuizen

Kuolung (Dino) Lei

Dominik P Jaeggi

Matthew Thompson

A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.

Asymmetric out-of-plane accelerometer

A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.

MEMS sensor with offset anchor load rejection

A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least one proof mass relative to the sensing reference plane, wherein the pattern of sensing elements comprises at least three sensing elements in each of the four quadrants.

Offset rejection electrodes

A system and method for reducing offset in a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, a pattern of sensing elements coupled between the sensing reference plane and the at least one proof mass to detect motion normal to the sensing reference plane, wherein the pattern of sensing elements shares at least three axes of polarity anti-symmetry, and a signal processing circuit to combine the pattern of sensing elements thereby providing an output proportional to the external excitation. In a second aspect, the sensing reference plane is divided by two axes forming four quadrants on the sensing reference plane.

A MEMS (microelectromechanical systems) structure comprises a MEMS wafer. A MEMS wafer includes a cap with cavities bonded to a structural layer through a dielectric layer disposed between the cap and the structural layer. Unique configurations of MEMS devices and methods of providing such are set forth which provide for, in part, creating rounded, scalloped or chamfered MEMS profiles by shaping the etch mask photoresist reflow, by using a multi-step deep reactive ion etch (DRIE) with different etch characteristics, or by etching after DRIE.

Reduction of chipping damage to MEMS structure

A method and system for a MEMS device is disclosed. The MEMS device includes a free layer, with a first portion and a second portion. The MEMS device also includes a underlying substrate, the free layer movably positioned relative to the underlying substrate. The first portion and second portion of the free layer are coupled through at least one stem. A sense material is disposed over portions of the second portion of the free layer. Stress in the sense material and second portion of the free layer does not cause substantial deflection of the first portion.

MEMS device with a stress-isolation structure

Improved electric field (steered-electron electric-field, or SEEF) sensors and methods of manufacturing the same are provided. The SEEF sensors described herein may have increased sensitivity to low-frequency electric fields while being smaller than previously known sensors, and may allow for low-power electric field detection. The invention described herein allows for sensitive, long-term electric field monitoring for applications ranging from personnel detection to underground facility monitoring, as well as extraordinarily small vector sensing (full Poynting vector) for compact direction-finding of emitters of interest. Exemplary electric field sensors may accurately sense, measure, characterize and/or transmit electric field data over a wide frequency range. Importantly, such sensing, measuring, and/or characterizing do not require any physical or resistive contact between the sensor and a source of an electric field.

Steered-electron electric-field (SEEF) sensor program

The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.

Proportional micromechanical valve

A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capacitor electrode and is separated therefrom by a gap. The major surface of the movable capacitor electrode includes a rigidity-increasing feature. The rigidity-increasing feature further provides a capacitance-increasing topography and reduces snap-together of the capacitor electrodes.

Variable capacitor having a rigidity-increasing feature

A tunable capacitor. The tunable capacitor has a first fixed capacitor electrode and a second fixed capacitor electrode opposite to one another. The tunable capacitor also has a movable element formed of a conductive material. The movable element is moveable between the first fixed capacitor electrode and the second fixed capacitor electrode to adjust the capacitance between the first fixed capacitor electrode and the second fixed capacitor electrode.

Tunable capacitor

A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in fluid communication with the cavity. The body also has first and second primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator is operably coupled to the pilot valve for moving the pilot valve. A microvalve is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end and a second end. The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.

Thermally actuated microvalve device

Proportional micromechanical device

A capacitor having a bottom plate, a top plate and a support connected to the center portion of the top plate for positioning the top plate over the bottom plate and separated therefrom by a gap. The outer portion of the top plate moves relative to the bottom plate when a potential is applied between the plates. The outer portion may be connected to the center portion of the top plate by springs such that the movement of the top plate relative to the bottom plate is accommodated by bending at least one of the springs. The capacitor may also include an insulating layer between the top and bottom plates disposed so as to prevent the top plate from shorting to the bottom plate. A spacer for setting the minimum distance between the outer portion of the top plate and the bottom plate may also be included.

Micromachined parallel-plate variable capacitor with plate suspension

Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an orifice. A pressure-equalizing contour is positioned beneath the displaceable member and is in fluid contact with the inlet port. The pressure on the displaceable member from the inlet port is equalized by the pressure from the pressure-equalizing contour. Consequently, the microvalve can be configured with its inlet port and outlet port on opposite sides of the microvalve. Pressures in the x and y direction are also equalized because of recesses that permit fluid from the inlet to contact all faces of the displaceable member.

Growing community of inventors

Portola Valley, CA, United States of America

Kirt Williams