Mitsubishi Denki Kabushiki Kaisha

Kirokazu Moyoshi

Natsuro Tsubouchi

Akira Nishimoto

An oxidizing tube encircled by an electric heater is disposed within a pressure envelope. A high pressure inert gas is supplied to the envelope and tube while hydrogen and oxygen are supplied to the tube while being kept at an elevated temperature to react with each other to form steam. The steam oxidizes the surfaces of silicon wafers placed in the tube to form silicon dioxide films on them. Alternatively a water evaporator may be disposed within the pressure envelope to directly supply steam to the tube with the high pressure gas aiding the supply of the steam.

Growing community of inventors

Itami, Japan

Kirokazu Moyoshi