Advanced Technology Materials, Inc.

Entegris, Inc.

Ametek, Inc.

Kirk Mikkelsen

Glenn M Tom

Kevin T O'Dougherty

Donald D Ware

Peter C Van Buskirk

John Russell Kingery

Minna Hovinen

Amy Koland

Paul Dathe

Jason Gerold

Dennis F Brestovansky

Greg Nelson

Michael A Cisewski

David Wandler

Kevin Nesdahl

Matthew Smith

Tim Hoyt

John Jancsek

Robert Haapala

Kevin T O'DOUGHERTY

Kevin T O´Dougherty

Russel Oberg

Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.

Liner-based liquid storage and dispensing systems with empty detection capability

Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.

Liquid dispensing systems encompassing gas removal

An electrocardiography (ECG) electrical cable, that includes a plurality of insulated conductors, a conductive shield surrounding the plurality of insulated conductors and an insulating jacket surrounding the plurality of insulated conductors and the conductive shield. Also, each of the plurality of insulated conductors includes a low noise coating and the insulated conductors are tightly bound together by a semi-conductive wall interposed between the insulated conductors and the shield, thereby reducing rubbing, which can produce triboelectric effects.

Low noise ECG cable and electrical assembly

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Chanhassen, MN, United States of America

Kirk Mikkelsen