Average Co-Inventor Count = 4.09
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (6 from 1,408 patents)
6 patents:
1. 11977097 - Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
2. 11680963 - Method and apparatus for examining a measuring tip of a scanning probe microscope
3. 11353478 - Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
4. 11237187 - Method and apparatus for examining a measuring tip of a scanning probe microscope
5. 10732501 - Method and device for permanently repairing defects of absent material of a photolithographic mask
6. 10372032 - Method and device for permanently repairing defects of absent material of a photolithographic mask