Taiwan Semiconductor Manufacturing Comp. Ltd.

King-Yuen Wong

Fu-Wei Yao

Jiun-Lei Jerry Yu

Chen-Ju Yu

Fu-Chih Yang

Chun-Wei Hsu

Chih-Wen Hsiung

Po-Chih Chen

Ming-Wei Tsai

Chun Lin Tsai

Han-Chin Chiu

Ming-Cheng Lin

Chan-Hong Chern

Da-Wen Lin

Mark Chen

Chien-Chang Su

Chien-Tai Chan

Ru-Yi Su

Chu Fu Chen

Yu-Syuan Lin

Chia-Yu Lu

Chun Hsiung Tsai

Su-Hao Liu

Chun-Lin Tsai

Chung-Yi Yu

Kuo-Feng Yu

Chia-Pin Lin

Chi-Ming Chen

Chung-Cheng Wu

Po-Chun Liu

Yi-Fang Pai

Ming-Lung Cheng

Yen-Chun Lin

Man-Ho Kwan

Tysh-Bin Liu

Tysh-Bin Lin

Yi-Cheng Tsai

Chia-Shiung Tsai

Cheng-Yuan Tsai

Xiaomeng Chen

Yao-Chung Chang

Sheng-De Liu

The present disclosure, in some embodiments, relates to a semiconductor device. The semiconductor device includes an electron supply layer that is disposed over an upper surface of a semiconductor material and that is laterally arranged between a first conductive terminal and a second conductive terminal. A III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer is disposed over the III-N semiconductor material, along a side of the III-N semiconductor material, and over the electron supply layer. An insulating material is arranged over the passivation layer and along opposing sidewalls of the second conductive terminal, and a gate structure is disposed over the passivation layer. The passivation layer has an uppermost surface that is directly coupled to a sidewall of the passivation layer. The insulating material extends along the sidewall of the passivation layer.

HEMT-compatible lateral rectifier structure

The present disclosure, in some embodiments, relates to a method of forming a transistor device. The method may be performed by forming an anode and a cathode over an electron supply layer disposed on a semiconductor material. A doped III-N semiconductor material is formed over the electron supply layer, and an insulating material is formed over the electron supply layer and the doped III-N semiconductor material. The insulating material continuously extends from over the anode to over the cathode. The insulating material is patterned to form sidewalls of the insulating material that define an opening over the doped III-N semiconductor material. A gate structure is formed directly between the sidewalls of the insulating material and over the doped III-N semiconductor material.

Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformably over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.

High-electron-mobility transistor and manufacturing method thereof

The present disclosure, in some embodiments relates to a semiconductor device. The semiconductor device includes a layer of semiconductor material disposed over a substrate and an electron supply layer disposed over the layer of semiconductor material between an anode terminal and a cathode terminal. A layer of III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer contacts an upper surface of the electron supply layer and further contacts an upper surface and a sidewall of the layer of III-N semiconductor material. A gate structure is separated from the layer of III-N semiconductor material by the passivation layer.

Devices are described herein for a low static current semiconductor device. A semiconductor device includes a power transistor and a driving circuit coupled to and configured to drive the power transistor. The driving circuit includes a first stage having an enhancement-mode high-electron-mobility transistor (HEMT) and a second stage that is coupled between the first stage and the power transistor and that includes a pair of enhancement-mode HEMTs.

Low static current semiconductor device

A high electron mobility transistor (HEMT) includes a silicon substrate, an unintentionally doped gallium nitride (UID GaN) layer over the silicon substrate. The HEMT further includes a donor-supply layer over the UID GaN layer, a gate structure, a drain, and a source over the donor-supply layer. The HEMT further includes a dielectric layer having one or more dielectric plug portions in the donor-supply layer and top portions between the gate structure and the drain over the donor-supply layer. A method for making the HEMT is also provided.

High electron mobility transistor structure

A channel layer is grown over a substrate, and an active layer is grown over the channel layer, wherein the active layer has a band gap discontinuity with the channel layer. A dielectric layer is deposited over the active layer, and the dielectric layer is patterned to expose a portion of the active layer. A metal diffusion barrier is formed over the exposed portion of the active layer, and a gate is deposited over the metal diffusion barrier.

Method of making transistor having metal diffusion barrier

Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.

Manufacturing method for high-electron-mobility transistor

A high electron mobility transistor (HEMT) includes a first compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second compound layer between the salicide source feature and the salicide drain feature.

High electron mobility transistor

A transistor includes a first layer over a substrate. The transistor also includes a second layer over the first layer. The transistor further includes a carrier channel layer at an interface of the first layer and the second layer. The transistor additionally includes a gate structure, a drain, and a source over the second layer. The transistor also includes a passivation material in the second layer between an edge of the gate structure and an edge of the drain in a top-side view. The carrier channel layer has a smaller surface area than the first layer between the edge of the gate structure and the edge of the drain in the top-side view.

High electron mobility transistor structure and method of making the same

A device includes a first transistor having a first source terminal, a first drain terminal, and a first gate terminal; and a second transistor having a second source terminal, a second drain terminal, and a second gate terminal. The second source terminal is coupled to the first gate terminal and the first source terminal is coupled to the second gate terminal. The first transistor has a first threshold voltage, and the second transistor has a second threshold voltage different from the first threshold voltage.

Semiconductor device and circuit protecting method

Devices, systems, and methods are described herein for a low static current semiconductor device. A semiconductor device includes a power transistor and a driving circuit coupled to and configured to drive the power transistor. The driving circuit includes a first stage having an enhancement-mode high-electron-mobility transistor (HEMT) and a a second stage that is coupled between the first stage and the power transistor and that includes a pair of enhancement-mode HEMTs.

A high electron mobility transistor (HEMT) includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and is different from the first III-V compound layer in composition. A salicide source feature and a salicide drain feature are in contact with the first III-V compound layer through the second III-V compound layer. A gate electrode is disposed over a portion of the second III-V compound layer between the salicide source feature and the salicide drain feature.

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Hong Kong, China

King-Yuen Wong