Hitachi, Ltd.

The Tokyo Electric Power Company, Incorporated

Chubu Electric Power Company, Inc.

The Chugoku Electric Power Co., Inc.

Kimio Yamada

Tetsuya Matsui

Shigeru Izumi

Masatsugu Nishi

Mitsuo Suzuki

Masahiro Tooma

Yoshihiro Michiguchi

Izumi Kobayashi

Yuuji Hashimoto

Manabu Ueno

A laser plasma X-ray source has an improved X-ray conversion efficiency and a minimized occurrence of debris, and a semiconductor lithography apparatus using the same and a method therefor are provided. An X-ray generation unit has a vacuum chamber 5 which encases the target; target supply unit 110 which supplies a fine particle mixture gas target into the vacuum chamber 5; a laser irradiation unit 120 which irradiates a laser beam 2 on the particle mixture gas target 10; and a target recovery unit 130 which recovers unused particle mixture gas target from the vacuum chamber 5.

Laser plasma x-ray source, semiconductor lithography apparatus using the

A number of sound detectors are provided on an external enclosure of a pressure vessel of a nuclear reactor. Output signals produced from the individual detectors are combined into a pattern in terms of time difference of the detector output signals relative to the time point at which the detected signal is first produced in response to the sound signal and relative peak values of the detector output signals relative to the magnitude of the output signal produced by the detector which detects the sound signal with the highest sensitivity. The pattern thus obtained is then compared with patterns which have been previously prepared by intentionally producing the sound signals at locations in interest within the pressure vessel, to thereby estimate the location within the pressure vessel at which the sound is produced.

Method of locating sound generation within enclosure

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Hitachi, Japan

Kimio Yamada