Tokyo Electron Limited

Kiminori Okada

Shinichiro Araki

Katsuhiko Matsuda

Toru Yamauchi

Taichi Ito

Susumu Nakajima

Nobuhiro Horiuchi

Tadahito Nezu

An information processing apparatus for processing information on semiconductor treatment apparatus includes an abnormality information display device which displays information on an abnormality in semiconductor treatment apparatus, a countermeasure information receiving device which receives countermeasure information on countermeasure, a countermeasure information storing device which stores the countermeasure information matched with abnormality identification information, an output device which outputs the countermeasure and abnormality identification information via communication device to outside, a countermeasure item display device which displays countermeasure item candidates, a countermeasure item storing device which stores countermeasure item selected from the candidates matched with the abnormality identification information, a countermeasure item transmitting device which transmits the countermeasure item and abnormality identification information via the communication device to outside, a countermeasure item statistic receiving device which receives statistic regarding the countermeasure item corresponding to the abnormality identification information from outside, and a countermeasure item statistic display device which displays the statistic.

Information processing apparatus, processing system, processing method, and program

An interlock system can discriminate a controller in which an abnormality occurs in a control system of a semiconductor manufacturing apparatus in which a plurality of controllers are connected through a network. A processing system contains at least one processing chamber which performs a semiconductor manufacturing process. A conveyance system takes an object to be processed in and out of the processing chamber. The control system includes at least one apparatus controller, which controls the processing system and the conveyance system, and an equipment controller, which manages the apparatus controller. The apparatus controller and the equipment controller are communicably connected through a network. The apparatus controller and the equipment controller are also connected via a hard wire so as to transmit a status signal of the apparatus controller and the equipment controller to the control system so that a presence of each apparatus controller and a status of connection between the controllers can be detected without using communication through the network.

Semiconductor manufacturing apparatus detecting state of connection between controllers

Growing community of inventors

Nirasaki, Japan

Kiminori Okada