Azbil Corporation

Kimihiro Sato

Keisuke Obara

Jun Ichihara

An improved diaphragm vacuum gauge including a sensor chip that includes a first electrode provided on a base and a second electrode provided on a diaphragm so as to face the first electrode, the diaphragm and the base being disposed with a gap therebetween, and in which a distance between the first electrode and the second electrode changes in accordance with displacement of the diaphragm caused by pressure of a measurement target medium. The diaphragm vacuum gauge further includes an operational amplifier that converts a current output from the first electrode to a voltage and amplifies the voltage, and a coaxial cable that connects the first electrode and the operational amplifier with each other. Further, the first electrode is connected to a virtual ground of the operational amplifier by a core wire of the coaxial cable.

Diaphragm vacuum gauge with decreased parasitic capacitance

An improved diaphragm vacuum gauge includes a pressure receiving unit having an electrical property that changes in accordance with displacement of a diaphragm caused by pressure of a measurement target medium; a heater that heats the pressure receiving unit; a temperature sensor that measures a temperature of the pressure receiving unit; a pressure measurement unit that converts a change in the electrical property of the pressure receiving unit to a pressure measurement value; a storage unit that stores a plurality of heating temperature settings; a heating temperature setting unit that selects one heating temperature setting from among the plurality of heating temperature settings in accordance with a digital input signal that is externally input; and a controller that controls power supply to the heater based on the temperature measured by the temperature sensor and the heating temperature setting selected by the heating temperature setting unit.

Growing community of inventors

Chiyoda-ku, Japan

Kimihiro Sato