Showa Denko Kabushiki Kaisha

Showa Denko K.k.

Kimie Takagi

Mikio Suzuki

Noriyuki Miyamoto

Emi Shimaoka

Wenqiang Lu

Hiroshi Daio

A process for producing a magnetic recording medium, which comprises the steps of forming a non-magnetic undercoat film and a magnetic film on a non-magnetic substrate; forming a carbonaceous protective film thereon through plasma CVD to produce a disk D; etching the surface of a carbonaceous protective film in an etching apparatus by use of plasma generated from an etching gas; and forming a lubricating film on the carbonaceous protective film surface.

Magnetic recording medium and production process thereof

A production process for a magnetic recording medium comprising a non-magnetic substrate, a non-magnetic undercoat film, a magnetic film, and a protective film predominantly comprising carbon, which protective film is formed through a plasma CVD method by use of carbon-containing gas as a source and which process comprises applying an oxygen plasma to carbon deposits on the inner walls of a chamber or carbon present in the chamber for transformation.

Production process for magnetic recording medium

A hydrogenated or fluorinated carbon protective film is formed on a disk through a plasma CVD method by use of a hydrocarbon-containing reaction gas as a raw material, where the disk comprises a non-magnetic substrate on which a non-magnetic undercoat film and a magnetic film are successively formed, wherein the protective film has a thickness of 2.2 g/cm or more.

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Chiba, Japan

Kimie Takagi