University of California

Michigan State University

Innovative Micro Technology

Owl Biomedical, Inc.

Kimberly L Turner

John Stuart Foster

Kamala Qalandar

Stefan Miltenyi

Steven M Shaw

Kevin Shields

Nicholas C Martinez

John Harley

Mehran Hoonejani

Daryl Grummitt

Jaquelin K Spong

Benedikt Zeyen

Brad E Paden

Brian S Strachan

Michael T Northen

Jeffrey F Rhoads

Barry E DeMartini

Rong Liu

A frequency divider apparatus includes a micro-electro-mechanical system ('MEMS') divider that is configured to be driven by an input signal. The MEMS divider includes a passive mechanical device that generates multiple output signals. Each of the output signals has a frequency less than a frequency of the input signal.

Frequency divider apparatus

A particle manipulation system uses a MEMS-based, microfabricated particle manipulation device which has an inlet channel, output channels, and a movable member formed on a substrate. The movable member moves parallel to the fabrication plane, as does fluid flowing in the inlet channel. The movable member separates a target particle from the rest of the particles, diverting it into an output channel. However, at least one output channel is not parallel to the fabrication plane. The device may be used to separate a target particle from non-target material in a sample stream. The target particle may be, for example, a stem cell, zygote, a cancer cell, a T-cell, a component of blood, bacteria or DNA sample, for example. The particle manipulation system may also include a microfluidic structure which focuses the target particles in a particular portion of the inlet channel.

Particle manipulation system with out-of-plane channel and focusing element

Particle manipulation system with out-of-plane channel

A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.

MEMS particle sorting actuator and method of manufacturing

A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.

Coupled mass-spring systems and imaging methods for scanning probe microscopy

Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Dual substrate MEMS plate switch and method of manufacture

An on/off reversible adhesive mechanism, and method for fabricating same. The adhesive mechanism is a hierarchical system comprised of a micro-scale compliant surface having one or more nano-structures thereon, wherein the compliant surface is moved by applying a magnetic field either to engage the nano-structures with an adhering surface or to remove the nano-structures from the adhering surface.

On/off reversible adhesive

A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.

Sensor with microelectro-mechanical oscillators

A frequency stability analysis and design method for frequency robust resonators, such as MEMS resonators, is presented. The frequency characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on the sidewall of the structure being considered, the first and second order frequency sensitivities to the fabrication error are derived. A relationship between the proof mass area and perimeter, and the beam width, is developed for single material structures, which expresses that the proof mass perimeter times the beam width should equal six times the area of the proof mass. Design examples are given for the single material and multi-layer structures. The results and principles presented in the paper can be used to analyze and design other MEMS resonators.

Growing community of inventors

Santa Barbara, CA, United States of America

Kimberly L Turner