Japan Pionics Co., Ltd.

Kiichirou Araya

Yukichi Takamatsu

Mitsuhiro Iwata

Takeo Yoneyama

Koji Kiriyama

A vaporizing and supplying method for controlling a liquid CVD material in flow rate with liquid flow rate controllers, supplying a vaporizer with the material, vaporizing the same, and supplying a semiconductor manufacturing apparatus with the vaporized material, which includes installing in parallel, a plurality of liquid flow rate controllers, preferably each having a different controllable range of flow rate, and supplying the vaporizer with the material at a variable flow rate thereof by altering the single use of any of the controllers to the simultaneous use of a plurality thereof or vice versa, and/or switching any of the controllers one after another.

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Kanagawa, Japan

Kiichirou Araya