University System of Maryland

Kihan Park

Jaydev P Desai

Hardik Jeetendra Pandya

A MEM-based device and method of fabrication, the device comprising a biochip substrate comprising one or more compliant materials, a plurality of mechanical and electrical micro-sensors configured in an array to simultaneously measure electrical and mechanical properties of a sample, wherein a first mechanical micro-sensor is formed as a patterned layer of at least one of the compliant materials, wherein the patterned layer is coupled to a first pillar comprising a dielectric material formed onto the compliant materials, the first pillar being coated with a metal film at a contact surface with the sample and along a side of the first pillar to act as a conductive probe for the first electrical micro-sensor, and wherein the first pillar is formed on the first mechanical micro-sensor to transfer a force to the first mechanical micro-sensor.

MEMS-based device and method for multi-parameter characterization of biological tissues

A system for automated simultaneous measurements of multiple parameters (mechanical, electrical and/or thermal) of biological tissues includes a base platform supporting a biochip holder module with a biochip integrated therein and an indenter for nano- and micro-scale indentation of a tissue. The biochip is formed with an array of micro-sensors, for example, electromechanical micro-sensors integrated on a substrate of the biochip. A temperature microsensor maybe additionally formed, for example, on the tip of the indenter to measure thermal characteristics of the tissue specimen heated by the micro-heater fabricated on the biochip.

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Atlanta, GA, United States of America

Kihan Park