Applied Materials, Inc.

Kien-Bang Lam

Jonathan Stuart Frankel

Julia S Svirchevski

Younes Achkire

Younces Achkire

A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.

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San Jose, CA, United States of America

Kien-Bang Lam