Globalfoundries Singapore Pte. Ltd.

Chartered Semiconductor Manufacturing Ltd (corporation)

Denselight Semiconductor Pte Ltd

Kian Siong Ang

Hao Wang

Guy Eristoff

Sung Woon Choo

Ting Cheong Ang

Hiroshi Nakamura

Subrata Halder

Geok Ing Ng

An optical color sensor system is provided including providing a substrate having an optical sensor therein and forming a passivation layer over the substrate. The passivation layer is planarized and color filters are formed over the passivation layer. A planar transparent layer is formed over the color filters and microlenses are formed on the planar transparent layer over the color filters.

Optical color sensor system

In the present invention, a semiconductor device is formed which includes an MIM capacitor located on the upper surface of a heterostructure from which the emitter, base and collector sections of a nearby HBT are defined. In this way the capacitor and HBT share a substantially common structure, with the base and emitter electrodes of the HBT fashioned from the same metal layers as the upper and lower capacitor plates, respectively. Furthermore, as the insulator region of the capacitor is formed prior to definition of the HBT structure, the dielectric material used can be deposited by means of a plasma enhanced process, without damaging the HBT structure.

Fabrication of a heterojunction bipolar transistor with integrated MIM capacitor

Growing community of inventors

Singapore, Singapore

Kian Siong Ang