National Yang Ming Chiao Tung University

Hermes-epitek Corporation

Kian-Poh Wong

Pi-Ying Cheng

Tsan-Hua Huang

Chia-Ying Lin

Yu-Hsien Lee

Fang-Fu Guo

I-Chung Lin

A gas injector used for semiconductor equipment includes a housing shell, a rotating main shaft and a gas output distribution unit. The rotating main shaft is covered with the housing shell, and includes a plurality of magnetic fluid seals and a plurality of gas transmission tubes. The gas output distribution unit is coupled to a top end of the rotating main shaft, the gas output distribution unit being connected to a ceiling and a susceptor. The gas output distribution unit includes a plurality of boards spaced at intervals between the ceiling and the susceptor, thereby resulting in a plurality of gas output layers for outputting corresponding reaction gases.

Gas injector used for semiconductor equipment

The present invention discloses a sensing device, wherein a hemispherical container containing a liquid dielectric, and the hemispherical container has more than two pairs of electrodes, and the liquid dielectric can trigger the conduction states of the electrodes. A corrosion-resistant material envelops the container. A precision valve is arranged in the container and used to adjust the level of the liquid dielectric and the sensitivity of the sensing device. A buffer necking part is also arranged in the container and used to prevent from non-expected vibration-induced contact between the electrodes and the liquid dielectric. A leakage-proof detection device envelops the hemispherical container, the liquid dielectric, the precision valve, and the buffer necking part and functions to prevent from the leakage of the liquid dielectric. Thus, the present invention can provide an adjustable multi-directional tilt-sensing device for level control.

Sensing device

The present invention provides an assistant apparatus for surmounting a barrier, which comprises a carrier body, an assistant mechanism, and a sensing/driving apparatus. The assistant mechanism, disposed at a side of the carrier body, having an assistant block disposed at the end thereof, functions to place the assistant block on the ground between the carrier body and the barrier so that the carrier body is capable of surmounting the barrier through the assistance of the assistant block. The sensing/driving apparatus, coupled to the assistant mechanism, functions to drive the assistant mechanism to generate the adjusting movement according to whether the barrier is detected or not. By means of the design of the present invention, the assistant block is adopted to reduce the height surmounted by the carrier each time so that the carrier is capable of surmounting the barrier section by section.

Assistant apparatus for surmounting barrier

The present invention discloses a barrier-overpassing transporter, which comprises: a support frame carrying a rider or another load; a sensing/adjusting module detecting a tilting state of the support frame and maintaining the support frame in a horizontal state; a ground contact module arranged below the support frame supporting an effective load and lifting the support frame to overpass a surface of a barrier; and a wireless transceiver module collecting and transmitting information to enable adjustments and activities responding to interior states of the transporter. Thereby, the present invention can provide a safe, stable, reliable, comfortable, convenient and low-cost barrier-overpassing transporter.

Growing community of inventors

Hsinchu, Taiwan

Kian-Poh Wong