Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Sdi Co., Inc. (2 from 7,636 patents)
2 patents:
1. 11608471 - Composition for etching silicon nitride film and etching method using same
2. 11254871 - Etching composition for silicon nitride layer and method of etching silicon nitride layer using the same