Samsung Electronics Co., Ltd.

Ki Moon Lee

Chi Gun An

Hyun-Joong Kim

Jong Kyu Kim

Kwang-Jun Kim

Jin Ho So

Yong Joon Hong

Beom Soo Hwang

Chi-Gun An

Min Sung Ha

Dae Hyung Park

Hui Gwan Lee

Duke Kimm

An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the residual gas detector is less than or equal to a set residual amount of gas, the mobile robot recovers the gas cylinder from inside the gas cabinet and transfers a gas cylinder stored in the storage queue to the gas cabinet.

Automated gas supply system

A motor velocity control apparatus and method in which the velocity of a motor to drive a joint of a robot is controlled. The method includes generating a velocity profile of the motor based on velocity profile generation data received from a user; judging whether one velocity section selected from velocity sections divided from the generated velocity profile corresponds to a high velocity region, where the high velocity region corresponds to an acceleration compensation section in which an acceleration section transitions to a constant velocity section; estimating an acceleration corresponding to the current velocity of the motor, upon judging that the velocity section corresponds to the high velocity region, the acceleration corresponding to the current velocity is estimated using an acceleration-velocity graph in the acceleration compensation section or a deceleration compensation section; compensating for the velocity profile using the estimated acceleration; and driving the motor using the compensated velocity profile.

Motor velocity control apparatus and method

Disclosed herein are a motor control apparatus and a motor control method thereof. The motor control method includes estimating a current torque of a motor based on dynamics of a body driven by the motor, judging whether the estimated torque is higher than a predetermined torque value, compensating for a velocity profile to drive the motor from the predetermined torque value, upon judging that the estimated torque is higher than the predetermined torque value, and driving the motor using the compensated velocity profile. Thereby, the velocity profile is compensated for in real time, and thus the velocity of the motor is raised while preventing the motor from stepping out.

Motor control apparatus and motor control method thereof

Disclosed is a teaching and playback method using a redundancy resolution parameter determined in conjunction with a joint structure, for a robot, and a method to apply analytic inverse kinematics to a robot having an elbow with an offset and a computer-readable medium of controlling the same. A reference plane variable with the joint structure is generated and an angle between the reference plane and an arm plane of the robot is used as the redundancy resolution parameter. The robot is taught and its operation is played back in differential inverse kinematics or analytic inverse kinematics using the resolution redundancy parameter.

Teaching and playback method based on control of redundancy resolution for robot and computer-readable medium controlling the same

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Yongin-si, South Korea

Ki Moon Lee