Samsung Electronics Co., Ltd.

Ki Hyun Yoon

Sang Min Hyun

In Shik Kim

Do Hyung Kim

Chi Young Ahn

Keun Young Lee

Yang Jic Lee

Hyun Seok Lim

Hong Pyo Kim

Soo Jung Lee

Jeong Gil Lee

Seong Hun Ahn

Seung Hoon Hyun

Semiconductor devices and methods of forming the same are provided. Semiconductor devices may include a plurality of gate electrodes that are stacked on a substrate and are spaced apart from each other in a vertical direction and a channel region extending through the plurality of gate electrodes in the vertical direction. Each of the plurality of gate electrodes may include a first conductive layer defining a recess recessed toward the channel region, and a second conductive layer in the recess defined by the first conductive layer. A first concentration of impurities in the second conductive layer may be higher than a second concentration of the impurities in the first conductive layer, and the impurities may include nitrogen (N).

Semiconductor devices and method of forming the same

Electronic device

Steam cleaner

Cleaner

Growing community of inventors

Busan, South Korea

Ki Hyun Yoon