Skhynix Inc.

Ki-Hong Yang

Ki-Hong Lee

A method for fabricating a semiconductor device includes forming a through-hole penetrating through an alternating stack pattern and forming a gap-fill layer, wherein a sacrificial gap-fill layer of the gap-fill layer fills the through-hole. The method also includes forming a mask layer over the alternating stack pattern and over the gap-fill layer, wherein the mask layer includes a self-aligned opening overlapping the filled through-hole and overlapping a portion of an uppermost material layer of the alternating stack pattern adjacent to the filled through-hole. The method further includes forming a first contact hole through the alternating stack pattern by performing a single etch using both the mask layer and the portion of the uppermost material layer as etch barriers to remove, through the self-aligned opening, the sacrificial gap-fill layer filling the through-hole.

Method for fabricating semiconductor device

A method for fabricating a non-volatile memory device includes forming a stacked structure where a plurality of inter-layer dielectric layers and a plurality of second sacrificial layers are alternately stacked over the first gate electrode layer, forming a first channel hole that exposes the first sacrificial layer by penetrating through the stacked structure, forming a second channel hole by removing the exposed first sacrificial layer, forming an oxide layer by oxidizing a surface of the first gate electrode layer exposed through the first and second channel holes, forming a channel layer in the first and second channel holes, and forming second gate electrode layers in spaces from which the second sacrificial layers are removed, wherein a memory layer is interposed between the channel layer and the second gate electrode layer.

Growing community of inventors

Seongnam-si, South Korea

Ki-Hong Yang