Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Electronics and Telecommunications Research Institute

Ki Bang Lee

Jae-joon Choi

Young-Ho Cho

Sung-gyu Kang

Ci-moo Song

Hee-Moon Jeong

Jin Woo Hong

Kyeong Ok Kang

Hee-moon Jeong

Kyu-yong Kim

Byung-leul Lee

Hee Soo Kim

A comb structure in which a magnetic force, which is generated between a pair of intermeshed combs by applying a magnetic flux thereto, is constant with respect to the relative motion between the combs, is provided. Also, an actuator and an inertia sensor both using the comb structure are provided. The comb structure includes a pair of magnetic combs, a magnetic flux guide for magnetically connecting the pair of combs, a coil wound around an arbitrary portion of the magnetic flux guide, and a power supply connected to the coil. The pair of magnetic combs intermeshed with each other having a gap S therebetween are connected to each other by the magnetic flux guide, such that they are driven by receiving a magnetic field from the coil. The coil is supposed to generate a magnetic field under the influence of a current provided from the power supply.

Comb structure using magnetic force and actuator and inertia sensor both using the comb structure

A telephone system is provided with a receiver equipped to enable a hearing-impair person to receive a telephone call through bone-conduction and air-conduction hearing. Such a receiver comprises a frame supporting a main vibration source including a cylindrical bobbin and a voice coil wound around the bobbin to convert a voice signal into a variation of a magnetic field; a vibration generator including a yoke arranged inside a lower portion of the bobbin, an electromagnet arranged on the yoke to create a gap with the bobbin, and an upper plate arranged on the electromagnet to support the electromagnet; an auxiliary vibration source including an air-conduction vibrator arousing air-conduction hearing and a bone-conduction vibrator arousing a bone-conduction hearing; and a vibration transmitter arranged to transmit vibrations from the main vibration source and the bone-conduction vibrator of the auxiliary vibration source to a transmission portion where a bone-conduction hearing transmission is selected for bone-conduction hearing.

Telephone with a receiver arousing bone-conduction and air-conduction hearing

A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure

A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p,-type or n,-type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.

Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof

A vibratory structure and a method for controlling the natural frequency thereof are provided. The vibratory structure has an elastic member one end portion of which is fixed to a first support end, an inertial object for vibrating by the elastic force of the elastic member, a moving electrode attached integrally to the inertial object, an effective stiffness controlling electrode fixed to a second support end, and a power supplier for generating electric force between the moving electrode and the effective stiffness controlling electrode. The moving electrode and the effective stiffness controlling electrode are formed into a predetermined shape, so that the electric force varies linearly according to the displacement of the inertial object. Thus, the natural frequency of the vibratory structure is controlled by changing the voltage applied across the moving electrode and the effective stiffness controlling electrode.

Vibratory structure, method for controlling natural frequency thereof

A vibratory structure and a method for controlling the natural frequency thereof are provided. The device has at least one elastic member supported by a first support end, an inertial object which vibrates by the elastic force of the elastic member, a moving electrode coupled to the inertial object, at least one effective stiffness controlling electrode supported by a second support end, and a power supplier for applying a voltage to generate an electric force between the moving electrode and the effective stiffness controlling electrode. This vibratory structure can contribute to controlling and improving the performance of a sensor, an actuator or a gyroscope, which employs the vibratory structure.

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Seoul, South Korea

Ki Bang Lee