The Foxboro Company

Khoren Keusseyan

Wayne A Dessert

The invention relates to a vortex flow meter for ultra pure applications. The vortex flow meter of the invention employs a smooth and continuous fluorocarbon layer to coat a number of fluid accessible surfaces of the flowmeter. The coating prevents or minimizes contact between the process fluid and the fluid accessible surfaces of the flowmeter, thus allowing the flow meter to measure the flow rate of a process fluid having a level of purity of typically one part per trillion without contaminating the fluid. The flowmeter of the invention is advantageously less costly and more accurate than conventional flow meters for ultra pure applications.

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Arlington, MA, United States of America

Khoren Keusseyan