Tokyo Electron Limited

Imec Vzw

Khashayar Babaei Gavan

Eric Beyne

Tatsuya Yamaguchi

Koichi Yatsuda

Yannick Feurprier

Frederic Lazzarino

Jean-Francois De Marneffe

Boon Teik Chan

Zheng Tao

Efrain Altamirano Sanchez

Kaidong Xu

Vasile Paraschiv

XiuMei Xu

A semiconductor device manufacturing method of forming a trench and a via in a porous low dielectric constant film formed on a substrate as an interlayer insulating film, includes: embedding a polymer having a urea bond in pores of the porous low dielectric constant film by supplying a raw material for polymerization to the porous low dielectric constant film; forming the via by etching the porous low dielectric constant film; subsequently, embedding a protective filling material made of an organic substance in the via; subsequently, forming the trench by etching the porous low dielectric constant film; subsequently, removing the protective filling material; and after the forming a trench, removing the polymer from the pores of the porous low dielectric constant film by heating the substrate to depolymerize the polymer, wherein the embedding a polymer having a urea bond in pores is performed before the forming a trench.

Semiconductor device manufacturing method

A method for producing a structure including, on a main surface of a substrate, at least one elongated cavity having openings at opposing ends. The method includes providing a substrate having a main surface. On the main surface, a first pair of features are formed that protrude perpendicularly from the main surface. The features have elongated sidewalls and a top surface, are parallel to one another, are separated by a gap having a width sand a bottom area, and have a width wand a height h. At least the main surface of the substrate and the first pair of features are brought in contact with a liquid, suitable for making a contact angle of less than 90&#xb0; with the material of the elongated sidewalls and subsequently the substrate is dried.

Method of forming micro-pipes on a substrate and a structure formed thereof

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Leuven, Belgium

Khashayar Babaei Gavan