Varian Semiconductor Equipment Associates, Inc.

Kevin Verrier

Bon-Woong Koo

Jason M Schaller

Svetlana Radovanov

Eric D Hermanson

Kevin M Daniels

Richard M White

James W Blanchette

A system and method are disclosed for controlling an ion beam. A deceleration lens is disclosed for use in an ion implanter. The lens may include a suppression electrode, first and second focus electrodes, and first and second shields. The shields may be positioned between upper and lower portions of the suppression electrode. The first and second shields are positioned between the first focus electrode and an end station of the ion implanter. Thus positioned, the first and second shields protect support surfaces of said first and second focus electrodes from deposition of back-streaming particles generated from said ion beam. In some embodiments, the first and second focus electrodes may be adjustable to enable the electrode surfaces to be adjusted with respect to a direction of the ion beam. By adjusting the angle of the focus electrodes, parallelism of the ion beam can be controlled. Other embodiments are described and claimed.

Deceleration lens

Growing community of inventors

Newmarket, NH, United States of America

Kevin Verrier