University of California

Kevin T Cook

Constance J Chang-Hasnain

Jiaxing Wang

Jonas H Kapraun

Emil Kolev

Jipeng Qi

A vertical cavity surface emitter device (e.g., VCSEL or RC-LED) containing a buried index-guiding current confinement aperture layer which is grown, and lithographically processed to define position, shape and dimension of an inner aperture. In a regrowth process, the aperture is filled with a single crystalline material from the third contact layer. The aperture provides for both current and optical confinement, while allowing for higher optical power output and improved thermal conductivity.

Vertical cavity surface emitting device with a buried index guiding current confinement layer

A high-contrast grating (HCG) structure and method of fabrication. The grating of the HCG is formed over a structural spacer layer, allowing a wider range of grating patterns, such as post and other forms which are lack structural support when fabricated over an air spacing beneath the grating elements. The technique involves etching the HCG grating, followed by oxidizing through this HCG grating into an oxide spacer layer beneath it creating a low-index area beneath the grating. This form of HCG reflector can be utilizes as upper and/or lower reflectors in fabricating vertical cavity surface emitting lasers (VCSELs).

Oxide spacer HCG VCSELS and fabrication methods

A widely tunable vertical-cavity surface-emitting laser (VCSEL) having a semiconductor cavity followed by an air-gap over which is a movable reflector. Lasing wavelength is controlled by a combination of the resonance of the semiconductor cavity, which is fixed, and the resonance of the air cavity, which can be changed by moving the reflector. Tuning range and slope of the VCSEL are increased by configuring the semiconductor cavity to be antiresonant at the center of the tuning range, which forces electromagnetic energy to be confined more strongly in the air gap than in the semiconductor, thus making emission wavelength more sensitive to the displacement of the tuning mirror.

Growing community of inventors

Berkeley, CA, United States of America

Kevin T Cook