Cvc Products, Inc.

Kevin S Gerrish

Dorian Heimanson

Alan T Stephens, Ii

Paul H Ballentine

A sputtering apparatus for depositing a thin film (,) of magnetic material on a substrate (,) is modified to include a plate-shaped electromagnet (,, or,) for orienting magnetic domains within the film (,). The electromagnet (,, or,) has conductive windings (,, and,; or,) that are arranged for producing a magnetic field (,or,) within a plane (,) corresponding to a surface of the substrate (,). Field strength vectors (,) vary in absolute magnitude between points located along a first axis (,), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (,).

Low-pressure processing system for magnetic orientation of thin magnetic film

A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).

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Spencerport, NY, United States of America

Kevin S Gerrish