Air Products and Chemicals, Inc.

Kevin Ray Heier

Scott Jeffrey Weigel

James Edward MacDougall

Mahendra L Joshi

Timothy Weidman

Alexandros T Demos

Robert Parkash Mandal

Aleksandar Georgi Slavejkov

Nikolaos Bekiaris

Yunfeng Lu

Michael P Nault

Mark Daniel D'Agostini

Jeannine M Harris

Mahendra Ladharam Joshi

A process provides a ceramic film, such as a mesoporous silica film, on a substrate, such as a silicon wafer. The process includes preparing a film-forming fluid containing a ceramic precursor, a catalyst, a surfactant and a solvent, depositing the film-forming fluid on the substrate, and removing the solvent from the film-forming fluid on the substrate to produce the ceramic film on the substrate. The ceramic film has a dielectric constant below 2.3, a halide content of less than 1 ppm and a metal content of less than 500 ppm, making it useful for current and future microelectronics applications.

Mesoporous films having reduced dielectric constants

An ultra low NOx burner for process heating is provided which includes a fluid based flame stabilizer which provides a fuel-lean flame at an equivalence ratio in the range of phi&equals;0.05 to phi&equals;0.3 and fuel staging lances surrounding the flame stabilizer in circular, flat, or load shaping profiles, each lance comprising a pipe having a staging nozzle at a firing end thereof, each lance having at least one hole for staging fuel injection, and each hole having a radial divergence angle and an axial divergence angle. The at least one hole and the divergence angles provide circular, flat or load shaping flame pattern. The burner provides NOx emissions of less than 9 ppmv at near stoichiometry combustion conditions.

Ultra low NOx burner for process heating

A symmetric device for stabilization of a flame includes a primary oxidant pipe and a fuel pipe. The fuel pipe is internal to the primary oxidant pipe creating a primary oxidant conduit. A secondary oxidant pipe is internal to the fuel pipe creating a fuel conduit. A primary oxidant source supplies oxidant to the primary oxidant conduit. A fuel source supplies fuel to the fuel conduit. A secondary oxidant source supplies oxidant to the secondary oxidant pipe. The first oxidant velocity is greater than the second oxidant velocity and the fuel velocity is less than the second oxidant velocity. The primary oxidant pipe end extends past the fuel pipe forward end and the fuel pipe forward end extends past the secondary oxidant pipe end. A mismatch in velocity between fuel and oxidant generates a large scale vortex. An asymmetric embodiment is also provided.

Large scale vortex devices for improved burner operation

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Macungie, PA, United States of America

Kevin Ray Heier