Beijing Apollo Ding Rong Solar Technology Co., Ltd.

Apollo Precision Kunming Yuanhong Limited

Kevin Lynch

Paul K Shufflebotham

Robert Michael Martinson

Heinrich Von Bunau

Daniel R Juliano

Deborah Sloan

Mathew Sheffield

A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.

Cooling water jet pack for high power rotary cathodes

A deposition apparatus includes an input spool located in non-vacuum input module, at least one vacuum process module, an accumulator, and an air to vacuum sealing mechanism. The accumulator and the sealing mechanism are configured to continuously provide a web substrate from the input spool at atmosphere into the at least one process module at vacuum without stopping the web substrate.

Continuous web apparatus and method using an air to vacuum seal and accumulator

Growing community of inventors

Santa Clara, CA, United States of America

Kevin Lynch